I’ve previously talked about China’s difficulties in catching up to the west in semiconductor manufacturing here, here, and here, among other places. To summarize: Western nations have an advanced, highly interconnected semiconductor manufacturing ecosystem that China doesn’t have the technical expertise to replicate. In particular, China has nothing like ASML’s extreme ultraviolet lithography machines (AKA a “stepper”) necessary to build the most advanced chips with the smallest feature geometries.
Though advancements that SMIC and Huawei have made in the semiconductor sector in recent years are pretty impressive, the companies are 10 to 15 years behind industry giants like Intel, TSMC, and Samsung, said Christophe Fouquet, chief executive of toolmaker ASML. It’s well known that even with the best-in-class DUV tools, Chinese fab SMIC will be unable to match TSMC’s process technologies cost-effectively. This is because Chinese companies cannot access leading-edge EUV lithography tools.
“By banning the export of EUV, China will lag 10 to 15 years behind the West,” said Christophe Fouquet in an interview with NRC (machine translated). “That really has an effect.”
ASML has never shipped its EUV tools to China due to the Wassenaar Arrangement, despite SMIC’s reported order for one EUV machine. The details remain unclear, but ASML did not deliver the machine to the Chinese foundry due to US sanctions. However, ASML kept shipping advanced DUV lithography tools, such as the Twinscan NXT:2000i, which are capable of producing chips on 5nm and 7nm-class process technologies.
As a result, SMIC has been producing chips for Huawei using its 1st-generation and 2nd-generation 7nm-class process technology for years now. This has certainly helped the Chinese high-tech giants weather U.S. government sanctions.
Having understood that EUV tools are not coming to China, Huawei and its partners have explored extreme ultraviolet lithography themselves with the aim of building their own lithography chipmaking tools and ecosystem, which will take 10 – 15 years at best. For reference, it has taken over 20 years for ASML and its partners from foundational work to complete commercial machines to build the EUV ecosystem.
China thought it had found a way out of the western ban on high end lithography machines. Turns out: Not so much.
“In the past two years, China has spent a staggering 8 billion euros to procure fewer than 120 Advanced immersion DUV lithography machines from Dutch company ASML.” DUV (Deep Ultraviolet) was the generation of machines before EUV, and can’t effectively pattern features of less than 10nm.
“On the surface this seemed like a bold and extravagant move. However, as of September 7th, the reality has turned into a bitter irony. Maintenance and upgrades for these machines are now completely restricted. In other words, starting next year these state-of-the-art [not quite – LP] lithography machines could become little more than scrap. To make matters worse, even repairs for older equipment are off the table.”
“Lithography machines are the backbone of semiconductor manufacturing, etching intricate circuits onto silicon wafers. Without proper maintenance and upgrades, these machines, worth tens of millions of euros each, will gradually deteriorate into expensive junk. Producing advanced chips smaller than 14 nanometers will become nearly impossible. Yield rates will plummet and costs will skyrocket.”
“Even TSMC, a global benchmark, requires ASML engineers to be stationed on site for regular recalibrations every 3 to 6 months. Earlier this year, an earthquake in Taiwan caused TSMC’s lithography operations to halt, and it took a month of recalibrations to resume lithography.” Requalification is indeed a huge pain in the ass.
“Machine maintenance depends on ASML proprietary components, software and technical support. Hiring a few engineers, or even the CEO of ASML, won’t solve the fundamental complexities of this highly specialized system. China’s attempts to rely on sheer manpower to bridge this gap are wishful thinking.”
“Thinking a few engineers could crack this technology is simply laughable. Lithography machines are just the tip of the iceberg in the complex semiconductor manufacturing supply chain.”
“China owns nearly 1,400 ASML lithography machines. With Western restrictions on maintenance spare parts and engineering services, these multi-million euro machines have been reduced to a rob Peter to pay Paul situation keeping them operational for just one more day at a time. Chip production is bound to shrink, creating a vicious cycle.”
“New sanctions implemented in September have blocked sales of models like the NXT1970i, shutting down access to both hardware and technology. At best, China’s capabilities remain stuck at the level of ASML’s older NXT 1470 machines, which date back to the early 2000s.”
“China’s so-called domestic lithography machines are limited to 65 nanometer dry DUV technology, with some reports claiming they can reach 55 nanometer. However, this is equivalent to ASML 2006-era technology, putting China 18 years behind. Worse, key components for these domestic machines still rely on suppliers from Japan and Germany.”
“China’s domestic lithography machines are largely a symbolic effort, more about saving face than actual technological advancement.”
There’s no way China can catch up to ASML in EUV lithography, and no way they can eliminate their deep dependence on western semiconductor manufacturing technology.
“Cutting edge EUV systems have been banned from China since 2019. Last June, high-end immersion DUV machines were added to the list. Now even older models like the NXT 1970i and 1980i can’t be sold or upgraded. China’s ambitions have been crushed, reducing it to square one.”
“This February, the Dutch Minister of Trade openly stated that China uses foreign high tech knowledge to advance its military capabilities, and ASML tools could produce sophisticated weapons. Handing over lithography machines to China is akin to arming an adversary, a move unacceptable on any strategic level.”
Without western technology, China’s desire for a technologically advanced semiconductor industry are dead in the water.
“The myth of China’s technological rise is unraveling and heading toward decline.”
When you buy a piece of high-end semiconductor equipment, you’re not just buying the machine, you’re buying the knowledgebase of deep technical expertise of both the on-site technical staff, as well as the process wizards back in Eindhoven, Santa Clara and Tokyo. There are inumerable parameters that need to be just right, and you need to know how to tweak them if the yield goes south. Without that expertise to guide you, the high end machines quickly become worthless.
I can imagine President Trump offering China a grand bargain, in which they stop stealing western technology, stop committing genocide against the Uighers, stop clashing with Philippine ships in the South China Sea, meet its treaty obligations regarding Hong Kong, and let international agencies inspects its high level bioweapon labs in exchange for easing semiconductor sanctions.
I doubt China would take such a deal, as it would be too humiliating for Xi to stand. But I can imagine Trump making it…
The fake Kamala bubble evaporates, another would-be Trump assassin is arrested, more Chinese spies on the staff of high profile Democrats, more NYC corruption raids, Ukrainian drones heat things up around Moscow, Intel and Stellantis layoff thousands each, another Harris County Democrat double-dips, a bit about Idaho, and some really stupid sailor shenanigans.
It’s the Friday LinkSwarm!
Evidently jailing Trump right before an election was a kangaroo too far even for this kangaroo court, so Trump’s sentencing has been pushed to after the election. “Judge Juan Merchan ruled Friday that Trump’s sentencing will take place on November 26, three weeks after election day, ensuring that Trump will not be sentenced in any of his criminal cases leading up to the election.”
In the friendliest possible format — a joint interview with VP nominee and emotional-support midwesterner Tim Walz, conducted by Dana Bash with the delicacy of an ornithologist gently hand-feeding hatchling chicks — Harris has revealed that her gaseously mindless word-cloud of a campaign is in fact an accurate reflection of her own personal vacuousness.
To be sure, Harris did not memorably self-destruct tonight. Whatever her failings, they are not those of Joe Biden, who couldn’t even articulate his words without slurring by the end. Her inarticulateness tonight was of the sort already known to be a Harris trademark, the endless jumble of nonsensical, comically vapid stock language. When she could fall back on a memorized list of talking points, she presented somewhat normally; the second she was required to respond directly to a question, then she began to spin out otiose nonsense like a pasta chef catering a Sicilian banquet. You could practically see the gears turning inside her head as she cast her eyes downward, stared laser-beams into the floor, and groped for cliches. She was more muted tonight than usual — her aides clearly ordered her never to display mirth under any circumstances, for fear the Kamala Kackle might emerge — and as a result, while she simulated sobriety for the most part, her body language was pronouncedly downbeat.
And all throughout she offered no answers to any policy questions whatsoever, nor any explanation for her various changes of position between 2020 and now. In theory, Bash asked most of the “right questions”; in practice, the way she solicitously asked them — sometimes even helpfully offering in advance a multiple-choice list of acceptable answers for Harris to choose from — turned them into cream puffs that Harris immediately used to serve up word salad.
Bash’s most pointed moment was when she pushed Harris about why she changed her position on a national fracking ban between 2020 and the present campaign. Harris’s answer was little more than, “Well, because I changed my mind when I became Joe Biden’s VP.” In the real world, anyone familiar with politics well understood that her “position” changed because Joe Biden — the presidential nominee — demanded it, and no other reason. Which of course is why it’s impossible to believe her when she says this is now her sincerely held view, as opposed to something to later be discarded once she can set her own priorities.
Eric Weinstein told Chris Williamson on the “Modern Wisdom” podcast that Donald Trump’s presidency has disrupted the old “rules-based international order,” which many view as an attempt to control global stability and wondered if the Republican nominee will “be allowed” to reenter the White House if elected in 2024. Weinstein argued that Trump’s unorthodox approach challenged the status quo, exposing flaws in the system and revealing that the impact of populist leaders on democracy and international agreements is more complex and significant than previously understood.
CHRIS WILLIAMSON: When we spoke at the start of the year, I said it was way too close to November to switch anybody out. Turns out that I was wrong.
ERIC WEINSTEIN: Beginner’s luck.
CHRIS WILLIAMSON: You said what are the odds that Joe Biden has a debilitating event between now and November including death, so he runs a one in 20 chance of dying in any given year or above that. I don’t think you know whether he’s even going to make it to November debilitating event could have been a debilitating public event
ERIC WEINSTEIN: I purposefully left it vague. I didn’t say the other part of it, which I now feel comfortable saying, which is…
CHRIS WILLIAMSON: What do you mean by that?
ERIC WEINSTEIN: I think there’s a remarkable story, and we’re in a funny game, which is: are we allowed to say what that story is? Because to say it, to analyze it, to name it, is to bring it into view. I think we don’t understand why the censorship is behaving the way it is. We don’t understand why it’s in the shadows or why our news is acting in a bizarre fashion. So let’s just set the stage, given that that was in February.
There is something that I think Mike Benz has just referred to as the rules-based international order. It’s an interlocking series of agreements, tacit understandings, explicit understandings, and clandestine understandings about how the most important structures keep the world free of war and keep markets open. There has been a system in place, whether understood explicitly or behind the scenes or implicitly, that says the purpose of the two American parties is to prune the field of populist candidates so that whatever two candidates exist in a faceoff are both acceptable to that world order.
From the point of view of, say, the State Department, the intelligence community, the defense department, and major corporations involved in international issues—from arms trade to, oh, I don’t know, food—they have a series of agreements that are fragile and could be overturned if a president entered the Oval Office who didn’t agree with them. And if the mood of the country was, “Why do we pay taxes into these structures? Why are we hamstrung? Why aren’t we a free people?” So what the two parties would do is run primaries with populist candidates and pre-commit the populist candidates to support the candidates who won the primaries. As long as that took place and you had two candidates that were both acceptable to the international order—that is, they aren’t going to rethink NAFTA or NATO or what have you—we called that democracy. And so democracy was the illusion of choice, what’s called magician’s choice, where the choice is not actually, you know, “pick a card, any card,” but somehow the magician makes sure that the card that you pick is the one that he knows.
In that situation, you have magician’s choice in the primaries, and then you’d have the duopoly field: two candidates, either of which was acceptable, and you could actually afford to hold an election. That way, the international order wasn’t put at risk every four years because you can’t have alliances that are subject to the whim of the people in plebiscites.
Under that structure, everything was going fine until 2016, when the first candidate ever to not hold any position in the military nor any position in government in the history of the Republic, Donald Trump, broke through the primary structure. Then there was a full court press: “Okay, we only have one candidate that’s acceptable to the international order. Donald Trump will be under constant pressure—he’s a loser, he’s a wild man, he’s an idiot, and he’s under control of the Russians.” And then he was going to be, you know, a 20-to-1 underdog, and then he wins. There was no precedent for this. They learned their lesson: you cannot afford to have candidates who are not acceptable to the international order and continue to have these alliances. This is an unsolved problem.
A Missouri man is facing federal charges following a series of alleged violent threats made via social media against former President Donald Trump, Republicans at large, and law enforcement officers, according to a criminal complaint filed in the Western District of Missouri on Aug. 30.
Justin Lee White, 36, is accused of using interstate communication to spread a slew of online threats to injure Trump, Republicans, and law enforcement in violation of federal law, culminating in a multi-agency investigation led by the FBI, according to the complaint.
Speaking of Trump assassination attempts, DHS personnel assigned to the protective detail for Trump’s Butler rally were given rigorous training. And by “rigorous training” I mean “they sat through a two hour webinar.”
Remember that “Harris Surge” in polls? Yet again, it was a case of oversampling.
As we’ve been highlighting since 2016, polls are not to be trusted thanks to various ‘tricks of the trade’ – most commonly, oversampling.
Last month we noted how the founder of the main outside spending group backing Kamala Harris for president says their own internal opinion polling is “much less rosy” than public polls.
“Our numbers are much less rosy than what you’re seeing in the public,” said Future Forward super PAC president Chauncey McLean said during a Monday event hosted by the University of Chicago Institute of Politics.
Now, the Washington Times reports that some pollsters are even sounding the alarm over Vice President Kamala Harris’ so-called ‘surge’ in the polls – which Harris pulled ahead in after replacing President Joe Biden as the Democratic nominee on July 21.
Since the switch, Harris is leading Trump nationally by nearly 2 percentage points and is either leading or tied with him in all seven battleground states. However, Republican analysts argue that these polling numbers may not accurately reflect voter sentiment due to biased polling methodology…
Critics point out that many polls have been sampling a disproportionately smaller share of Republican voters compared to exit poll data from the 2020 presidential election. The result, they say, is a misleading “phantom advantage” for Ms. Harris. According to them, this skewed sampling could be a strategic move to boost enthusiasm and fundraising for Ms. Harris’ campaign.
Trump campaign strategist Jim McLaughlin echoed this sentiment, stating, “They undersample Republicans” intentionally “to tamp down support and donations for Trump.” He added that the polls are part of a larger effort to create a narrative that favors Harris.
Trump has openly criticized the poll results. “It’s fake news,” Trump declared during a rally in Michigan. “They can make those polls sing.”
“Billionaire Mark Cuban Asked His Followers If They’d Prefer Their Kids Be Like Trump or Harris.” Turns out they preferred Trump by more than 2-1. (Hat tip: Instapundit.)
Another week, another high profile Democrat’s aide turns out to be a Chinese spy.
Linda Sun, a former aide to New York governor Kathy Hochul, acted at the direction of Chinese government and Chinese Communist Party officials while serving in state government, federal prosecutors alleged in an indictment Tuesday.
In a statement, the U.S. attorney’s office in the Eastern District of New York said that Sun was arrested Tuesday morning with her husband, Christopher Hu. They were expected to be arraigned later in the day.
Sun is a former deputy chief of staff to Kathy Hochul and has served in numerous roles throughout New York State government since her first post under the administration of former governor Andrew Cuomo in 2012. Before that, she served as Representative Grace Meng’s chief of staff, when the Queens Democrat served in the New York State assembly.
“As alleged, while appearing to serve the people of New York as deputy chief of staff within the New York State Executive Chamber, the defendant and her husband actually worked to further the interests of the Chinese government and the CCP,” U.S. Attorney Breon Peace said.
The federal government is alleging that Sun was an unregistered agent of the Chinese government and that her husband engaged in money-laundering while they benefited from millions of dollars in bribes from Chinese officials.
The indictment details a shocking pattern of collaboration with China’s consulate general in New York, with Sun at one point in 2020 letting a Chinese diplomat listen in on a private conference call for New York officials regarding the state government’s response to the Covid pandemic.
Chinese-government and CCP officials directed her to block Taiwanese officials from engaging with officials from New York. Beijing views the current government of Taiwan as a traitorous separatist movement and wants to annex the country.
According to court documents, Taiwan’s de facto consulate in New York City invited an unnamed politician, a description that matches the profile of then-governor Andrew Cuomo, to attend a banquet honoring then-Taiwanese president Tsai Ing-wen during her stopover in the city in 2019. Sun forwarded information about the invite to a Chinese official, telling that individual, “I sent you an email / Just an FYI / I already blocked it.” She then declined the invitation without consulting other New York executive chamber officials.
When Sun later asked a colleague to check if the politician was registered for the banquet, that staff member said that it was not on the schedule. Sun replied: “Perfect!”
She also manipulated messaging from the New York governor’s office, while consulting Chinese diplomats, the indictment stated.
Federal agents on Wednesday zeroed in on the highest ranks of Mayor Eric Adams’s administration, searching a home and seizing the phones of the New York City police commissioner, the first deputy mayor, the schools chancellor and others, according to people with knowledge of the matter.
The police commissioner. They seized the police commissioner’s phones. Wow.
Among the other officials the federal investigators sought information from were the deputy mayor for public safety and a senior adviser to the mayor who is one of his closest confidants, the people said. Both men have had other legal challenges.
The agents also searched the home and seized the phone of a consultant who is the brother of both the schools chancellor and one of the deputy mayors, the people said.
The nature of the investigations is unclear, but it appears that one is focused on the senior City Hall officials and the other touches on the police commissioner, the people said.
…
Representatives of the City Hall officials — the first deputy mayor, Sheena Wright; her partner, Schools Chancellor David C. Banks; the deputy mayor for public safety, Philip Banks III; and a senior adviser to the mayor, Timothy Pearson — could not be reached or declined to comment.
The consultant, Terence Banks, a brother of Philip Banks and David Banks, recently opened a government and community relations firm aimed at closing a gap “between New York’s intricate infrastructure and political landscape.” He, too, could not be reached for comment.
Several of the officials had their phones seized or records of their communications subpoenaed.
…
In addition to the police commissioner, Edward A. Caban, several other department officials, including Mr. Caban’s chief of staff and two Queens precinct commanders, also had their phones taken by federal agents, two of the people said.
Says Dwight: “It sounds like the whole Adams administration is so packed with corruption, they can’t even keep the lid screwed on.”
Behind the statistics: “August: 635K Foreign-Born Workers Gained Jobs as 1.3 Million Americans Lost Jobs.”
Germany’s conservative, populist, pro-border security Alternative for Germany won big in this week’s elections. Of course, the media, in unison, denounces anyone who objects to the mass importation of unassimilated Muslims into any European country as “far right.” And in Germany, this means they invariable compare Alternative for Germany to a certain mustachioed National Socialist.
President Trump endorses marijuana decriminalization vote. “Florida’s Amendment 3, titled Recreational Marijuana, would allow adults who are at least 21 years of age have up to 3 ounces of marijuana (a ‘small amount’?) and up to 5 grams of marijuana concentrate. At present, the state only allows medical patients with qualifying conditions to legally buy and possess cannabis.” Marijuana prohibition hasn’t worked. Full-bore marijuana legalization seems to have brought a whole host of problems, especially in blue states. Florida will provide another statewide laboratory of democracy to calibrate an approach.
Lowes may be getting out of the culture wars, but Home Depot is still in, having “partnered with LGBTQ mafia organization Human Rights Campaign on a school program that taught radical gender theory to elementary school kids.”
That budget deficit might also cause the Labour government to pull out of the F-35 procurement program. “Despite previous plans to acquire 138 F-35s, only 48 have been ordered.”
The head of Harris County’s Public Health Department, who was fired last week, has also been working for a California county since last January. Questions are swirling about her work in Texas, including her role in awarding a contract for sending mental health workers instead of police on some 911 calls.
Sources also say there is a pending criminal investigation into the county’s health department and related contracts.
County officials announced last Friday that Executive Director of Harris County Public Health Barbie Robinson had been dismissed, just days after the Houston Chronicle reported on communications surrounding a $6 million contract awarded to DEMA, a California-based company, to run the county’s Holistic Assistance Response Teams (HART).
The Texan has learned that in January 2024, Robinson also contracted with Yuba County, California to provide services for a three-year period. Robinson’s work for Yuba County’s public health department provides her with nearly $200,000 in compensation for hundreds of hours of work, all while managing Harris County’s public health department.
Sources familiar with the matter say that Robinson claimed to have obtained approval from former County Administrator David Berry and the County Attorney’s Office to engage in the additional work, but that current County Administrator Diana Ramirez was unable to confirm Robinson’s claims.
Other sources indicate that the Harris County District Attorney’s Office (HCDAO) has been investigating Robinson and nearly a dozen other individuals with the county, HART, and DEMA for several months.
This week, the McLennan County District Attorney’s Office dismissed murder charges against two Houston men involved in the self-defense incident at a party near the Baylor University campus, finally determining it was a justifiable homicide. While that was good news to Calvin Nichols Jr., it hardly makes up for the 635 days the man spent locked up in jail while the DA’s office slowly dragged its feet over the case.
According to police reports, on the night in question Nichols and his cousin, Jaytron Damon Scott, were invited to a party attended by a number of Baylor students, including football players. According to partygoers, Joseph Craig Thomas Jr. showed up uninvited and began threatening others with a gun, including a female student who asked him to move his car.
He later stuck a gun under the chin of a Baylor football player. And when Scott and Nichols were leaving the party, Thomas began to pistol whip Nichols.
That’s when Scott, acting in defense of his cousin, fired his pistol at Thomas, striking him multiple times and killing him. Murder charges were then filed against Scott and Nichols, a fact that Scott’s attorney, Bryan Cantrell, found unbelievable.
“I don’t know how this case got indicted,” Cantrell told KWTX.com. “This was the clearest self-defense case I have ever seen. And I think the problem is a lot of attorneys and, certainly the people of the community, don’t understand the law of self-defense.”
You would hope that the end of Abel Reyna’s term as McLennan County DA put a stop to this sort of thing, but evidently not.
The U.S. Department of Agriculture is preparing to implement the Biden-Harris administration’s Sustains Act which aims to regulate who will own environmental services.
According to private property rights advocates, American Stewards of Liberty (ASL), examples of environmental services include “the air we breathe, photosynthesis, pollination, and even the health benefits of open space.”
Specifically, the new law allows private funds to be used for conservation efforts on private land. The USDA will oversee the program, and the Secretary, preparing its implementation, will also decide who owns the environmental service.
Although the public may still provide the USDA with comments about the plan until September 16, 2024, ASL refers to the new law as “critical for proponents of the United Nations’ sustainable development agenda to achieve.”
The private property rights advocates see the program as a means to “provide the path to transfer America’s real assets from private citizens to federal and international interests.”
Screw both the Biden Administration and the UN.
The latest Stolen Valor Democrat is Maryland governor Wes Moore, who didn’t earn the Bronze Star he claimed he did.
Speaking of Idaho, how Micron defied the odds to become one of the biggest DRAM manufacturers in the world.
Intel just cancelled their 20A (2nm) node and will be fabbing their Arrow Lake processor at TSMC. “Intel projects it will save half a billion dollars by skipping the 20A node. The announcement comes as Intel embarks on a vast restructuring in the wake of troubling financial results last quarter. The company continues to lay off 15,000 workers, among the largest workforce reductions in its 56-year history.” It’s supposedly going full speed ahead with its 18A node, theoretically due in 2025. (Hat tip: Ace of Spades HQ.)
Intel and Japan are teaming up to work on EUV. Hard to see them making much progress given how large a lead ASML has…
Rael Enteen, Vice President of the Washington Commanders football team (AKA The Artist Formerly known As The Washington Redskins) has been fired.
He told…that, “over 50% of our roster is white religious, and God says, ‘F— the gays.’ Their interpretation. I don’t buy any of that. Another big chunk is low-income African Americans that comes from a community that is inherently very homophobic.”
…Enteen also said some players are “dumb as hell” and said some who were smart don’t stay that way after getting hit in the head too many times. He also said those who “get their heads knocked around a few times” are more susceptible to conspiracy theories.
Enteen also said, “I don’t think the commissioner of the NFL hates gay people, hates black people. Jerry Jones, who really runs the NFL, I think he hates gay people, black people.”
And James O’Keefe claims another scalp…
Legal Insurrection’s William A. Jacobson just got dis-invited from speaking on antisemitism at a synagogue in Tampa. “How could any Jew look around at the current geopolitical landscape and conclude that it’s safe to ignore all the various threats to their existence — not just Hamas terrorists in Gaza, but also the various murderous entities backed by the Islamic radical regime in Iran, to say nothing of Democratic primary voters in Dearborn, Michigan — because Trump is the real danger? What kind of cocoon are these people living in?”
This is going to be pretty esoteric for many of my readers, but in previous semiconductor posts covering ASML, some commenters have suggested that fabs can do multi-patterning for smaller nodes rather than having to use ASML’s extreme ultraviolet stepper. The following video explains why, below a certain threshold, no, you really can’t.
I’m not going to summarize every point, but the largest takeaway is that multi-patterning is computationally prohibitive. Double-patterning splits a single mask into two masks, each of which only create half of the mask pattern on the die. Double-patterning was fine for a while, but triple patterning and self-aligned double-patterning start making finding optimal solutions to the mask splitting problem exponentially more difficult.
Take a square. A square has four nodes in it. With double patterning, each of the two masks handle opposing sides of the square. And with this four-node shape, there are two double patterning options available for coloring. The EDA software thus has to check through them for design rule violations and whatnot. With triple patterning, the number of variations explodes exponentially. For that same square four node structure, triple patterning has 18 variations rather than just two with double patterning. A five node structure, 30. And so on. A semiconductor design can have hundreds of different nodes and design variations. The software needs to check through at least a good portion of these. This problem is not solvable in polynomial time. In other words, for you computer science nerds out there, it is an NP complete problem.
And then there’s the cost. “Depending on whose cost model you consult, [10nm]’s triple patterning makes its lithography module 3.85x higher than [28nm].” And the non-EUV 7nm node required triple-patterning and something called “self-aligned quadruple patterning.” And on Intel: “Brian Krzanich has said that in certain cases the company needs to use quad (4x), penta (5x), or hexa (6x) patterning for select features, as they need to expose the wafer up to six times to “draw” one feature. I am not super surprised that it wouldn’t yield. No wonder GlobalFoundries ditched their 7nm node.”
And this summary glosses over big differences between different fab technologies on different companies. TSMC’s 7nm isn’t the same as Intel’s 7nm.
Anyway, all this goes a long way to explain: Multi-patterning is much more painful than simply ponying up the cost for an ASML EUV stepper. And if you want to do 6nm, you have to use EUV.
For new, cutting edge fabs, the short answer is yes. If you’ve bought a new computer or smart phone in the last year, the chances that at least some of the layers in some of the chips went through an ASML EUV stepper approaches 100%.
The technology required to produce EUV sounds like something a crazy person would dream up:
Earlier generations of kit employ lasers to produce light directly. But as wavelengths shrink, things get trickier. Inside a cutting-edge EUV machine 50,000 droplets of molten tin fall through a chamber at its base each second. A pair of lasers zap every drop, creating a plasma that in turn releases light of the desired wavelength. The mirrors guiding this light, made of sandwiched layers of silicon and molybdenum, are ground so precisely that, if scaled to the size of Germany, they would have no bumps bigger than a millimetre. Because EUV light is absorbed by almost anything, including air, the process must take place in a vacuum. To get into the production facilities, your correspondent had to don a special suit and leave his notebook behind, lest it shed unwanted fibres.
The machines, weighing 180 tonnes and the size of a double-decker bus, are themselves a testament to the electronics industry’s tangled supply chains. ASML has around 5,000 suppliers. Carl Zeiss, a German optics firm, fashions its lenses. VDL, a Dutch company, makes the robotic arms that feed wafers into the machine. The light source comes from Cymer, an American company bought by ASML in 2013. ASML is, in turn, one of hundreds of firms that supply the chipmakers themselves. But it is so vital that Intel, Samsung and TSMC have all chipped in to finance its research and development in return for stakes in the firm.
The tool consists of a laser-driven tin (Sn) plasma light source, reflective optics comprising multilayer mirrors, contained within a hydrogen gas ambient. The hydrogen is used for keeping the EUV collector mirror in the source free of Sn deposition.
EUVL is a significant departure from the deep ultraviolet lithography standard. All matter absorbs EUV radiation. Hence, EUV lithography requires a vacuum. All optical elements, including the photomask, must use defect-free molybdenum/silicon (Mo/Si) multilayers (consisting of 40 Mo/Si bilayers) that act to reflect light by means of interlayer interference; any one of these mirrors absorb around 30% of the incident light.
Current EUVL systems contain at least two condenser multilayer mirrors, six projection multilayer mirrors and a multilayer object (mask). Since the mirrors absorb 96% of the EUV light, the ideal EUV source needs to be much brighter than its predecessors. EUV source development has focused on plasmas generated by laser or discharge pulses. The mirror responsible for collecting the light is directly exposed to the plasma and is vulnerable to damage from high-energy ions and other debris such as tin droplets, which require the costly collector mirror to be replaced every year.
Also:
An EUV mask consists of 40 alternating silicon and molybdenum layers; this multilayer acts to reflect the extreme ultraviolet light through Bragg diffraction; the reflectance is a strong function of incident angle and wavelength, with longer wavelengths reflecting more near normal incidence and shorter wavelengths reflecting more away from normal incidence. The pattern is defined in a tantalum-based absorbing layer over the multilayer. The multilayer may be protected by a thin ruthenium layer.
Got that? Good. That Wikipedia page is worth scrolling all the way through once for for the humbling realization of just how complex and precise dozens of different areas of chemistry, physics and optics combine to allow this one semiconductor tool to function.
“Sure, we’re zapping droplets of molten tin with high energy lasers in an atmosphere of pure hydrogen to create pulses of light reflected off eight impossibly smooth mirrors of 40 layers each to pattern billions of lines on a tiny patch of silicon at the heart of a $120 million, 180 ton machine, but it’s actually a lot more complex than I’m making it sound. Also, we do it 96 times on a single pass on a single 300mm wafer, and we handle 170 wafers an hour.”
Here are a couple of videos showing how large and complex an EUV stepper is:
