Posts Tagged ‘ASML’

Japan, The Netherlands Join China Semiconductor Ban

Tuesday, January 31st, 2023

Japan and The Netherlands have evidently decided to sign onto the Chinese semiconductor ban.

The talks between the US, Japan, and the Netherlands over wider bans on exports of semiconductor technology to China have reportedly seen the three agree to concerted action.

As The Register has often chronicled, the US has restricted exports of critical chipmaking and silicon technologies to China, hoping to prevent its economic and strategic rival from developing military technologies – and to protest human rights abuses.

While the Home of the Brave has spawned many of Earth’s most significant chipmakers and designers – Intel, AMD, Qualcomm and many others have headquarters stateside – other nations also export semiconductor tech to China. The Land of the Free would rather put a stop to that if possible.

The Biden Administration also recognizes that its bans could be seen as creating an opportunity for other nations to cash in on the absence of US vendors in the Chinese market. The three-nation talks therefore have the extra dimension of making sure America’s policies have their desired effect against China and don’t harm the home team.

Those twin desires saw Japan and the Netherlands in talks with the US last week, and according to numerous reports the meetings produced a unified approach to restrict semiconductor exports to China.

Without equipment from the US, Japan and The Netherlands, you can’t equip and run a modern semiconductor fabrication plant.

Peter Zeihan (him again), who has evidently lost a bet requiring him to dress as Gimli, discusses the ramifications.

This is one case where Zeihan gets the generalities right, but is wrong on some specifics.

  • Right: The idea that China can just forge a complete “alternative” semiconductor supply chain out of thin air to replace western alternatives is indeed “hideously wrong.” “The nature of the semiconductor industry is more of an ecosystem. There are there’s very few places that without, significant industrial build out, could even pretend to do more than two or three steps of it, much less than a dozen or so steps that are necessary.”
  • However, in conflating semiconductor manufacturing and semiconductor equipment manufacturing (possibly to avoid contracting hypothermia) he’s muddied things up a bit. There are five essential semiconductor equipment manufacturers:
    • Applied Materials (USA)
    • ASML (The Netherlands)
    • KLA (USA)
    • LAM Research (USA)
    • Tokyo Electron (Japan)

    If you’re building a modern, sub-10nm fab, chances are pretty good you need all five. You have to have an ASML EUV stepper, or else you have to go with trailing-edge machines from Canon and Nikon and deal with the computational pain and complexity of self-aligned quadruple patterning. You need KLA inspection tools to raise and maintain yields, and you need, at the very least, one of AMAT, LAM or TEL to provide the rest. Take away all three and you can’t equip a fab, period.

  • “We now have an agreement, and very soon the Dutch will formally be joining the sanction system against the Chinese.”
  • “The best [chips], these are 10 nanometer and smaller. This is typically what’s in your cell phone or in your high-end computers and servers those about 80% percent of them are actually fabricated in Taiwan, with another 20% in South Korea.” No. Although TSMC and Samsung are indeed leaders in this space, Intel has had 10nm processes running in their advanced fabs is Hillsboro and Chandler for a while, even though they’ve suffered yield problems.
  • His assertion that only China does legacy 90nm and above processes is false, as a look at this list of wafer fabs will attest, as there are a lot of companies (TI, TowerJazz, Oki, Mitsubishi, etc.) still profitably running older nodes, though many are comparatively funky technologies like BiCMOS, Analog, GaAs, etc.
  • Some quibbles about the details, but he gets the big picture right.

    As for his suggestion that companies stick to over 10nm nodes, well, I don’t think much of it. Those that can do >10nm nodes will and push the technology forward, and those that can’t afford to won’t…

    China’s Chip Industry Is Doomed

    Monday, September 19th, 2022

    This is a story that’s been bubbling on for a while, but it looks like the U.S. government is about to slam down export restrictions on chipmaking equipment.

    The administration of US President Joe Biden next month is to broaden curbs on US exports to China of semiconductors used for artificial intelligence and chipmaking tools, several people familiar with the matter said.

    The US Department of Commerce intends to publish new regulations based on restrictions communicated in letters earlier this year to three US companies — KLA Corp, Lam Research Corp and Applied Materials Inc, the people said, speaking on the condition of anonymity.

    Every wafer fabrication plant in the world uses equipment from one of those three companies. Applied Materials and LAM Research (along with Tokyo Electron) have their fingers in almost all areas of chipmaking equipment (PVD, CVD, Etch, etc.), while KLA (formerly KLA-Tencor) dominates the wafer inspection equipment segment. Add ASML in the Netherlands, and those five absolutely dominate the semiconductor equipment market.

    The letters, which the companies publicly acknowledged, forbade them from exporting chipmaking equipment to Chinese factories that produce advanced semiconductors with sub-14 nanometer processes unless the sellers obtain commerce department licenses.

    This is where things get tricky. SMIC claims they can do 7nm, but everyone outside China doubts they can do it reliably, repeatably and profitably. SMIC announced they’re about to start manufacturing 14nm, and that they can probably do. Practically, they’re the only semiconductor manufacturer in China that can do sub-14nm, as just about everyone at the top of the next biggest semiconductor manufacturer, Tsinghua Unigroup, just got arrested in July.

    There’s even talk that they’re actually zeroing in on FinFET technology specifically, though they may also ban sales of older chipmaking equipment as well.

    Without a continued stream of machines, spare parts and technical know-how from those five semiconductor giants, China’s semiconductor industry is doomed. China’s domestic semiconductor equipment industry is essentially garbage, and they’re so far behind in so many areas that they can’t even steal their way to parity. The knowledge gulf is just too vast.

    Min-Hua Chiang at the Heritage Foundation notes just how badly China’s domestic semiconductor industry is screwed.

    According to World Trade Organization statistics, China’s trade deficit in integrated circuits and electronic components (including Hong Kong’s trade deficit) has almost doubled from the equivalent of $135 billion in 2010 to $240 billion in 2020.

    The growing trade deficit in integrated circuits reveals one crucial fact: Achieving technological self-reliance is still a faraway Chinese dream. To keep its exports growing, China has no other way but to keep importing advanced chips to assemble into consumer goods with high-tech intensity (e.g., smartphones, tablets, and the like).

    Although China (including Hong Kong) is also the largest exporter of semiconductor chips in the world, less than 7% of chips produced in China were made by Chinese semiconductor companies in 2021.

    More than 90% of chips produced in China are made by foreign firms. In other words, China’s exports of semiconductor chips are overwhelmingly dominated by foreign companies.

    Its inferior level of technology is the main reason for China’s chip reliance on foreign firms. While Chinese firms are stuck with advancing toward 7nm chips, the Taiwan Semiconductor Manufacturing Co. and Samsung are progressing towards mass production of 3nm chips this year. Intel plans to take over TSMC’s leading role in semiconductor technology by 2025.

    The competition among a few tech giants in the U.S., Taiwan, and South Korea is clear, and the Chinese firms are not likely to jump into the global technology competition in the semiconductor industry anytime soon.

    The U.S. restrictions on exporting chipmaking equipment to China’s largest semiconductor firm, Semiconductor Manufacturing International Corp., have not only deterred China’s technological advancement, but also exposed the fundamental mismanagement problems inside China’s semiconductor industry.

    Xi might not have noticed his industry’s poor performance had China been able to continue to produce chips with foreign equipment.

    Some parts about the Tsinghua scandal snipped.

    Several Taiwanese executives leaving China’s semiconductor industry last year is another major setback in the development of China’s semiconductor industry.

    China not only spent tremendously on building chip plants and purchasing expansive equipment, but also on recruiting talent from overseas. Over the past few years, China recruited more than 3,000 skilled workers from Taiwan to work in China’s semiconductor industry.

    China amassed enormous capital, talent, and foreign equipment, but the problem is with governance. Xi’s absolute authority encouraged a rush into China’s semiconductor industry. Moreover, the extraordinary integration of the public and private sectors in China has twisted industrial development toward short-term profit-making, instead of long-term accumulation of manufacturing strength and technological improvement.

    Xi’s “wolf warrior” diplomacy has further overshadowed the outlook of its semiconductor industry. China’s success relies on close partnerships with various suppliers and customers in different countries across the globe. Alienating them on the geopolitical front only undermines those relationships.

    The U.S. ban on exporting chipmaking machines to China was the straw that broke the Chinese semiconductor industry’s back.

    On top of that, the CHIPS and Science Act just signed into law bans semiconductor companies receiving U.S. government subsidies from investing in China for the next 10 years. There are major loopholes in that prohibition, but if Congress can manage to keep the administration’s feet to the fire—including by tightening the legal restrictions—it could have a major impact on China’s tech development.

    In addition, the U.S. has extended the export restriction to 14 nm chipmaking machines to the Semiconductor Manufacturing International Corp. and other foreign chipmakers in China. A specific electronics design automation software for making advanced chips is also banned from exportation to China.

    Without foreign investment and inputs, China is only likely to deepen its reliance on importing advanced chips from overseas.

    Peter Zeihan notes (correctly) that China’s semiconductor industry has been singularly unable to fab advanced chips on their own.

    Not to mention that fraud still abounds. Chinese CPU semiconductor startup Quillion Technology closed up shop three months after raising $89 million.

    $89 million is probably enough to get you to tape-out for a fabless semiconductor house designing a smaller chip (or maybe even a low-power ARM-based CPUs for embedded markets), but it’s a woefully small sum for a real cutting-edge CPU company, and laughable if they intended to be an integrated design manufacturer fabbing their own chips, where building even a trailing edge fab starts in the billions.

    More on that topic:

    Takeaways:

  • “Money seems to have a strong corruptive power over CCP officials that they can’t resist. Like China’s real estate industry, China’s semiconductor industry is also plagued with corruption, over-construction, and highly leveraged capital maneuvers.”
  • She goes over the history of the Chinese “Big Fund” for semiconductors I covered here, and later talks about the indictments.
  • “The state-run Semiconductor Investment Fund was used more as an instrument to speculate in stocks than an institution for conducting basic R&D. The government-backed fund, aka the “Big Fund,” has investments in 2,793 entities within three layers of ownership.” Very few of them have the word “semiconductor” in their names. (Like I said before, shell games all the way down.)
  • From 1984 to 1990, the Ministry of Electronics Industry delegated the management of the vast majority of state-owned electronics enterprises to local provincial and municipal governments. While these state-owned enterprises (SOEs) obtained more autonomy, something strange happened. These companies imported outdated integrated circuit production lines that had no commercial value. The wasteful projects cost money, but people used the opportunities to take foreign trips, receive kickbacks, and send their children abroad. And this happened on a large scale.

    Pretty much classic ChiCom behavior.

  • China’s high-tech industry, like its financial industry, is dominated by powerful CCP families, and the Jiang Zemin family is one of them. In 1999, Jiang Zemin gave his oldest son, Jiang Mianheng, the reins of China’s “autonomous chip development.” As vice president of the Chinese Academy of Sciences (CAS) and president of the Shanghai branch for many years, the junior Jiang has long held the turf of China’s science and technology sector. He is also personally involved in the semiconductor business. His Shanghai Lianhe investment has holdings of Shanghai Zhaoxin Semiconductor Company.

  • Classic story:

    Chen Jin, a former junior test engineer at Motorola, joined Shanghai Jiaotong University in 2001 after returning to China.
    He was given the responsibility to develop the “Hanxin” chip, an important part of the state-run high-tech development program known as the “863 Program.” In just three years, Chen obtained 100 million in R&D funding and applied for 12 national patents. On Feb. 26, 2003, Chen’s team officially released the “Hanxin 1” chip. The Shanghai Municipal Government, the Ministry of Information Industry, and the Chinese Academy of Sciences all backed his work. The expert panel declared the “Hanxin 1” and its related design and application development platform as being the first of its kind in China and achieving an important milestone in the history of China’s chip development. Subsequently, Hanxin 2, 3, 4 and 5 chips were launched, all of which were claimed to have reached an advanced level globally. The Hanxin series of chips even entered the General Equipment Procurement Department of the Chinese military. However, 3 years later, on Jan. 17, 2006, “Hanxin 1” was revealed to be completely fake. Chen downloaded a Motorola chip source code through a former Motorola colleague. Then he secretly bought a batch of Motorola dsp56800 series chips, paid a peasant to scrape the original Motorola logo with sandpaper, and asked a local Shanghai print shop to print the “Hanxin” logo on it.

  • China correctly identified semiconductors and semiconductor equipment as key technologies for truly becoming the world’s preeminent technological manufacturing giant. Unfortunately for them (and fortunately for us), the CCP’s endemic culture of corruption and their top-down command economy are antithetical to the onrush of capitalist technological innovation that powers Moore’s Law.

    Semiconductor Update for July 18, 2022

    Monday, July 18th, 2022

    Enough links have filtered into the semiconductor bucket to be worth doing a roundup. This one touches on China and the corruption of our political elites.

  • The congressional Democrats’ attempt to throw money at the problem is going nowhere fast.

    The Biden administration is laser-focused on sending Ukraine billions of dollars in weapons, including the latest round of anti-ship systems, artillery rockets, and rounds of 105 mm ammo for howitzer cannons that it has entirely lost focus on reshoring efforts to boost semiconductor production Stateside.

    Multiple manufacturers of semiconductor wafers have announced plans for new multi-billion dollar factories across the U.S. but are contingent on Congress allocating funds to aid in building facilities under the Creating Helpful Incentives to Produce Semiconductors (CHIPS) for America Act.

    Congress passed the CHIPS Act in January 2021 as part of last year’s National Defense Authorization Act, which proposed $52 billion in funding for increasing the domestic capacity of chip production, though the House and Senate have come to a standstill over disagreements on certain parts of the bill that have sparked so much uncertainty among companies set to build new factories.

    In a letter on June 15, dozens of technology executives from IBM, Intel, Microsoft, Analog Devices, Micron, Amazon, and Alphabet called on Congress to move quickly on the CHIPS Act. They wrote, “the rest of the world is not waiting for the U.S. to act,” and funding for new chip factories must be achieved immediately.

    Taiwan’s GlobalWafers announced a new $5 billion factory in the U.S. on Monday, but contingent on subsidies from the federal government.

    “This investment that they’re making is contingent upon Congress passing the CHIPS Act. The [GlobalWafers] CEO told me that herself, and they reiterated that today,” U.S. Commerce Secretary Gina Raimondo told CNBC, the same day GlobalWafers announced its development plan.

    Notes:

    • IBM doesn’t own any fabs any more, having sold them all to GlobalFoundries.
    • Intel runs a huge number of very profitable fabs (troubles with their sub-10nm process yields notwithstanding) and doesn’t need federal subsidies.
    • Microsoft doesn’t own any fabs and is deeply unlikely to build any; their flagship Xbox Series X uses a custom AMD Zen 2 fabbed by TSMC as its CPU.
    • Analog Devices is an Integrated Device Manufacturer that owns several fabs with pretty old technology; they don’t have any 300mm fabs. They closed a small fab in Milpitas they got from their acquisition of Linear Technology last year. Designing analog chips is its own black art, and not everything that applies to shrinking digital circuits applies to the analog realm.
    • Amazon has no fabs and probably won’t be building any, but they do have a chip design division to support Amazon Web Services, and recently designed a cloud computing chip. They work closely with AMD (fabbed at TSMC), Intel (own their own fabs) and Nvidia (another fabless design house that also gets their chips fabbed at TSMC).
    • Alphabet AKA Google has no fabs and probably won’t be building any, though they do have a lot of AI chip design work going on.
    • GlobalWafers isn’t a semiconductor manufacturer, it’s a silicon wafer manufacturer. Making such wafers (the substrates upon which semiconductor fabrication depends) has its own challenges, but they are several orders less difficult than cutting edge chip fabrication. Maybe I’m quite far out of the loop, but I’m deeply suspicious that GlobalWafers planned wafer plant in Sherman, Texas will cost $5 billion. That’s a relatively piddling sum for a new semiconductor fab, but extremely expensive for a wafer factory. This makes me suspect a subsidy grab is afoot.

    So of the companies mentioned, Intel could suck up government funding to build a fab they were going to build anyway, I’m sure Analog Devices would build a fab with government money, but chances of them running an under 10nm process in said theoretical fab is extremely slim, none of the other mentioned copies are going to build a fab, and none of that government money is going to alleviate the main problem that the overwhelming majority of cutting edge chip designs have to flow through TSMC fabs in Taiwan. What will solve that problem is TSMC opening a state-of-the art fab in Arizona in 2024. No amount of U.S. taxpayer money will make that already-under-construction fab start producing chips any quicker.

    As I’ve mentioned previously, semiconductor subsidies are the wrong solution to the wrong problem.

    $250 billion in taxpayer subsidies wouldn’t get you a single additional wafer start this year, and probably would accomplish little more than channeling money to politically connected firms and sticky pockets in a state (New York) that no one wants to build fabs in any more because of high costs, high taxes and union rule requirements.

  • So who expects to earn immediate gains from the taxpayers subsidizing semiconductors? Would you believe Nancy Pelosi?

    I bet you would.

    This past week it hit the terminal that House Speaker Pelosi was doing a little portfolio re-jiggering, including exercising $8 million of call options in Nvidia and selling Apple and Visa calls. The data was per CongressTrading.com and was reported on by Bloomberg.

    The Nvidia LEAPS were bought June 3, 2021 with $100 strikes, set to expire June 17, 2022 and the position appeared to be disclosed on Thursday morning for the first time. $8 million trades seem a little odd for members of Congress to begin with, but who are we to judge?

    But then, what did Speaker Pelosi do just hours after disclosing the trade, on Friday?

    She threw her weight behind a stalled $50 billion CHIPS PLUS bill that “would provide $52 billion in funding for semiconductor manufacturing grants and investment tax credits for the chip industry.”

  • Speaking of TSMC, they’re tired of their customers using their old tech.

    We tend to discuss leading-edge nodes and the most advanced chips made using them, but there are thousands of chip designs developed years ago that are made using what are now mature process technologies that are still widely employed by the industry. On the execution side of matters, those chips still do their jobs as perfectly as the day the first chip was fabbed which is why product manufacturers keep building more and more using them. But on the manufacturing side of matters there’s a hard bottleneck to further growth: all of the capacity for old nodes that will ever be built has been built – and they won’t be building any more.

    Not strictly true. Remember, Bosch just finished building a 65nm fab.

    As a result, TSMC has recently begun strongly encouraging its customers on its oldest (and least dense) nodes to migrate some of their mature designs to its 28 nm-class process technologies.

    Nowadays TSMC earns around 25% of its revenue by making hundreds of millions of chips using 40 nm and larger nodes. For other foundries, the share of revenue earned on mature process technologies is higher: UMC gets 80% of its revenue on 40 nm higher nodes, whereas 81.4% of SMIC’s revenue come from outdated processes.

    That’s because UMC has fallen woefully far behind TSMC, and no one trusts them because they let Chinese spies walk out the door with other company’s IP. SMIC is on Mainland China, sucks even more, and is trusted even less.

    Mature nodes are cheap, have high yields, and offer sufficient performance for simplistic devices like power management ICs (PMICs). But the cheap wafer prices for these nodes comes from the fact that they were once, long ago, leading-edge nodes themselves, and that their construction costs were paid off by the high prices that a cutting-edge process can fetch. Which is to say that there isn’t the profitability (or even the equipment) to build new capacity for such old nodes.

    This is why TSMC’s plan to expand production capacity for mature and specialized nodes by 50% is focused on 28nm-capable fabs. As the final (viable) generation of TSMC’s classic, pre-FinFET manufacturing processes, 28nm is being positioned as the new sweet spot for producing simple, low-cost chips. And, in an effort to consolidate production of these chips around fewer and more widely available/expandable production lines, TSMC would like to get customers using old nodes on to the 28nm generation.

    “We are not currently [expanding capacity for] the 40 nm node” said Kevin Zhang, senior vice president of business development at TSMC. “You build a fab, fab will not come online [until] two year or three years from now. So, you really need to think about where the future product is going, not where the product is today.”

  • This video asks whether China can produce their own chips:

    Obviously, they already produce some of their own chips, but the video covers most of the issues China has with fabbing more complex chips that I’ve already discussed here and here. They’re still dependent on the same three leading fab companies (TSMC, Intel and Samsung) everyone else is for sub 10nm feature chips, and are overwhelmingly dependent on both foreign talent and foreign semiconductor equipment manufacturers like ASML and Applied Materials.

  • Speaking of TSMC and Intel, India would really like them to build fabs there. The problem is, despite a whole lot of technical talent there, it doesn’t have a terribly large domestic electronics manufacturing base.
  • Q: Can You Double-Pattern Rather Than Use EUV? A: You Don’t Want To

    Sunday, April 10th, 2022

    This is going to be pretty esoteric for many of my readers, but in previous semiconductor posts covering ASML, some commenters have suggested that fabs can do multi-patterning for smaller nodes rather than having to use ASML’s extreme ultraviolet stepper. The following video explains why, below a certain threshold, no, you really can’t.

    I’m not going to summarize every point, but the largest takeaway is that multi-patterning is computationally prohibitive. Double-patterning splits a single mask into two masks, each of which only create half of the mask pattern on the die. Double-patterning was fine for a while, but triple patterning and self-aligned double-patterning start making finding optimal solutions to the mask splitting problem exponentially more difficult.

    Take a square. A square has four nodes in it. With double patterning, each of the two masks handle opposing sides of the square. And with this four-node shape, there are two double patterning options available for coloring. The EDA software thus has to check through them for design rule violations and whatnot. With triple patterning, the number of variations explodes exponentially. For that same square four node structure, triple patterning has 18 variations rather than just two with double patterning. A five node structure, 30. And so on. A semiconductor design can have hundreds of different nodes and design variations. The software needs to check through at least a good portion of these. This problem is not solvable in polynomial time. In other words, for you computer science nerds out there, it is an NP complete problem.

    And then there’s the cost. “Depending on whose cost model you consult, [10nm]’s triple patterning makes its lithography module 3.85x higher than [28nm].” And the non-EUV 7nm node required triple-patterning and something called “self-aligned quadruple patterning.” And on Intel: “Brian Krzanich has said that in certain cases the company needs to use quad (4x), penta (5x), or hexa (6x) patterning for select features, as they need to expose the wafer up to six times to “draw” one feature. I am not super surprised that it wouldn’t yield. No wonder GlobalFoundries ditched their 7nm node.”

    And this summary glosses over big differences between different fab technologies on different companies. TSMC’s 7nm isn’t the same as Intel’s 7nm.

    Anyway, all this goes a long way to explain: Multi-patterning is much more painful than simply ponying up the cost for an ASML EUV stepper. And if you want to do 6nm, you have to use EUV.

    Extreme Ultraviolet Lithography Is Insane

    Thursday, April 8th, 2021

    People reading yesterday’s piece on China’s semiconductor industry have been asking “Wait, are you saying every semiconductor maker in the world relies on one Dutch firm?”

    For new, cutting edge fabs, the short answer is yes. If you’ve bought a new computer or smart phone in the last year, the chances that at least some of the layers in some of the chips went through an ASML EUV stepper approaches 100%.

    The technology required to produce EUV sounds like something a crazy person would dream up:

    Earlier generations of kit employ lasers to produce light directly. But as wavelengths shrink, things get trickier. Inside a cutting-edge EUV machine 50,000 droplets of molten tin fall through a chamber at its base each second. A pair of lasers zap every drop, creating a plasma that in turn releases light of the desired wavelength. The mirrors guiding this light, made of sandwiched layers of silicon and molybdenum, are ground so precisely that, if scaled to the size of Germany, they would have no bumps bigger than a millimetre. Because EUV light is absorbed by almost anything, including air, the process must take place in a vacuum. To get into the production facilities, your correspondent had to don a special suit and leave his notebook behind, lest it shed unwanted fibres.

    The machines, weighing 180 tonnes and the size of a double-decker bus, are themselves a testament to the electronics industry’s tangled supply chains. ASML has around 5,000 suppliers. Carl Zeiss, a German optics firm, fashions its lenses. VDL, a Dutch company, makes the robotic arms that feed wafers into the machine. The light source comes from Cymer, an American company bought by ASML in 2013. ASML is, in turn, one of hundreds of firms that supply the chipmakers themselves. But it is so vital that Intel, Samsung and TSMC have all chipped in to finance its research and development in return for stakes in the firm.

    The Wikipedia entry is even crazier:

    The tool consists of a laser-driven tin (Sn) plasma light source, reflective optics comprising multilayer mirrors, contained within a hydrogen gas ambient. The hydrogen is used for keeping the EUV collector mirror in the source free of Sn deposition.

    EUVL is a significant departure from the deep ultraviolet lithography standard. All matter absorbs EUV radiation. Hence, EUV lithography requires a vacuum. All optical elements, including the photomask, must use defect-free molybdenum/silicon (Mo/Si) multilayers (consisting of 40 Mo/Si bilayers) that act to reflect light by means of interlayer interference; any one of these mirrors absorb around 30% of the incident light.

    Current EUVL systems contain at least two condenser multilayer mirrors, six projection multilayer mirrors and a multilayer object (mask). Since the mirrors absorb 96% of the EUV light, the ideal EUV source needs to be much brighter than its predecessors. EUV source development has focused on plasmas generated by laser or discharge pulses. The mirror responsible for collecting the light is directly exposed to the plasma and is vulnerable to damage from high-energy ions and other debris such as tin droplets, which require the costly collector mirror to be replaced every year.

    Also:

    An EUV mask consists of 40 alternating silicon and molybdenum layers; this multilayer acts to reflect the extreme ultraviolet light through Bragg diffraction; the reflectance is a strong function of incident angle and wavelength, with longer wavelengths reflecting more near normal incidence and shorter wavelengths reflecting more away from normal incidence. The pattern is defined in a tantalum-based absorbing layer over the multilayer. The multilayer may be protected by a thin ruthenium layer.

    Got that? Good. That Wikipedia page is worth scrolling all the way through once for for the humbling realization of just how complex and precise dozens of different areas of chemistry, physics and optics combine to allow this one semiconductor tool to function.

    “Sure, we’re zapping droplets of molten tin with high energy lasers in an atmosphere of pure hydrogen to create pulses of light reflected off eight impossibly smooth mirrors of 40 layers each to pattern billions of lines on a tiny patch of silicon at the heart of a $120 million, 180 ton machine, but it’s actually a lot more complex than I’m making it sound. Also, we do it 96 times on a single pass on a single 300mm wafer, and we handle 170 wafers an hour.”

    Here are a couple of videos showing how large and complex an EUV stepper is:

    China’s Semiconductor Industry: Shell Games All The Way Down

    Wednesday, April 7th, 2021

    I’ve written about China’s semi-illusory semiconductor businesses before: “In China the question is always how much of that investment is real, and how much is illusion. A lot of those ‘under construction’ fabs never materialize, either unable to attract investors or having their funds magically siphoned off to some other enterprise.” While researching yesterday’s piece on the current semiconductor shortage, I came across this Emily Feng NPR piece on more multi-million dollar shenanigans in that space:

    In 2019, the U.S. sanctioned two major Chinese telecom firms, temporarily cutting them off from a vital supply of semiconductor chips — bits of silicon wafer and microscopic circuitry that help run nearly all our electronic devices.

    Wuhan Hongxin Semiconductor Manufacturing Co. promised a way out, toward self-reliance in the face of increasingly tough U.S. curbs on this technology. The private company once boasted on its website that it would raise a total of $20 billion to churn out 60,000 leading-edge chips a year.

    None of that would come to pass.

    Hongxin’s unfinished plant in the port city of Wuhan now stands abandoned. Its founders have vanished, despite owing contractors and investors billions of yuan.

    The company is one of six multibillion-dollar chip projects to fail in the last two years. Their rise and fall is a cautionary tale in an industry that is flush with state cash but still scarce on expertise — and a preview of the expensive and winding road China will have to take toward semiconductor self-sufficiency, now a national security priority.

    Hongxin Semiconductor began in November 2017 as a joint venture between Wuhan’s Dongxihu district government and a company called Beijing Guangliang Lantu Technology.

    The venture got off to a good start — on paper — but a closer look shows there were a number of issues. One of the co-founders of Guangliang had only finished elementary school and was allegedly using false credentials and a different identity, Cao Shan, according to 36Kr, a Chinese tech news outlet. Another co-founder, Li Xueyen, dabbled in selling Chinese traditional medicine, alcohol and tobacco before starting Hongxin, according to corporate records reviewed by NPR.

    These are not the profiles you look for in semiconductor startup founders.

    The two could not be reached for comment.

    Yeah, I bet.

    To balance out their lack of technical know-how, the Hongxin founders lured in one of Taiwan’s most famous semiconductor engineers, Chiang Shangyi, to serve as director. He left the company in 2020 to become the deputy chairman of China’s Semiconductor Manufacturing International Corp., telling Hong Kong paper South China Morning Post that his time at Hongxin was “a nightmare.” Chiang did not respond to NPR requests for comment.

    Hongxin made headlines in December 2019 when it managed to buy an older model lithography machine made by Dutch company ASML, despite American lobbying to prevent its sale to the Chinese chipmakers.

    OK, on the face of it that sounds pretty impressive. If you want to have a cutting edge fab, you have to have one of ASML’s top of the line Extreme Ultraviolet (EUV) steppers. In almost every other segment in the semiconductor equipment market, there’s competition between the three big players (Applied Materials, LAM Research and Tokyo Electron) and occasionally other companies (like Axcelis for ion implanters). But while you might be able to get away with lesser Deep Ultraviolet (DUV) lithography machines from Nikon or Canon for some tasks, for the smallest features on cutting edge 7 and 5nm nodes, you simply can’t do without an ASML EUV stepper. (More background here.)

    Well, guess what? The vaunted ASML tool Hongxin bought is apparently an older 1980 model (presumably this one, which dates from 2015, not 1980) which is DUV, not EUV.

    Back to the NPR piece.

    ASML sold the multimillion dollar piece of equipment — used to etch semiconductors — because of Jiang’s top-notch reputation, according to two people familiar with the sale who were not authorized to speak publicly about it. ASML declined to comment.

    Feng (or her editors) goofed here. ASML makes lithography machines, not etch tools.

    Hongxin’s timing was opportune. Chinese chip companies still rely heavily on European, American and Japanese technology — much of which, in turn, relies on American intellectual property, which the U.S. appears determined to keep out of Chinese hands. China’s semiconductor demand continues to surge beyond what it can supply itself; trade data show that in 2019, Beijing imported around $350 billion worth in chips.

    Given that reliance, China’s central and local governments have been pumping money into the sector to accelerate domestic chip design and manufacturing. The country’s latest five-year economic planning document released in March identifies integrated circuits — semiconductors — as a priority sector for research and development funding.

    When governments starts pumping big money into private companies, you can be sure multiple scams are never far behind.

    The all-out approach has notched achievements. Successful chip design companies such as Cambricon and Huawei’s HiSilicon have allowed Huawei to replace some of its U.S.-designed chips in its mobile phones.

    Cambricon and HiSilicon are both fabless design houses, and both get their chips fabbed at foundries like TSMC. Huawei is one of the largest electronics companies in the world, with over $100 billion in annual sales, and they don’t own their own fab.

    Not far from Hongxin is Yangtze Memory Technologies Co. (YMTC), a partially state-owned company that plans to double its output of memory chips to overtake South Korea’s Samsung and SK Hynix, which currently dominate production.

    Memory is a tough business. SK Hynix exists because Hyundai and LG (aka Lucky Goldstar), two huge Korean chaebols who hate each other only slightly less than rival Samsung, found the sledding too tough to go alone and had to combine their respective semiconductor operations to survive. Memory makes money hand-over-fist in boom times, but barely breaks even during busts. It’s less technically demanding than some other semiconductor segments, so China could conceivably make some headway there.

    YMTC is a subsidiary of Tsinghua Unigroup, a wholly owned business unit of Tsinghua University. Hu Haifeng, Communist Party secretary of Tsinghua Holdings, is the son of Hu Jintao, former CCP General Secretary and President of the People’s Republic of China.

    Hongxin sought to capitalize on this momentum. It rented a discreet office on the 25th floor of Wuhan’s Dongxihu district government headquarters.

    “Cao” and his partners promised to pitch in 1.8 billion yuan ($276 million) in investment on top of 200 million yuan ($30.7 million) in starting funds from Dongxihu district.

    Wuhan’s city government was, around the same time, also beginning construction on a cybersecurity park to provide office and residential space for technology businesses, and it was looking for a flagship company to anchor the complex. In 2018 and 2019, the city named Hongxin its most important “critical construction project” and the company began building its factory next door.

    As early as late 2019, even while Hongxin was being lauded by Chinese media for securing an ASML machine, several Wuhan-based construction crews were scrambling to get paid for millions of dollars of work for Hongxin.

    “Four months ago, [Hongxin’s] payments to us started to be short, and now we are missing 18 million yuan [$2.76 million],” one contractor, Lu Haitao told another, Wang Liyun in December 2019, according to phone recordings NPR obtained. Wang confirmed the authenticity of the recordings when reached by phone. Lu did not respond to several texts and calls from NPR. Wuhan’s municipal government did not respond to a request for comment.

    Meanwhile, two other semiconductor companies — Tacoma Semiconductor Technology Co. Ltd. and Dehuai Semiconductor Technology Co. Ltd. — were also running out of cash.

    Tacoma was over 350 miles from Hongxin along the Yangtze river, in the port city of Nanjing. There, the Taiwanese entrepreneur Joseph Lee had initially found a welcome harbor for his own ambitions, starting Tacoma in the city in 2015. He pledged to raise $3 billion to make wafer chips, with consultation from Israeli company Tower Semiconductor (formerly TowerJazz). Tower declined to comment for this story.

    Lee continued pitching other local governments. In 2016, he co-founded a second company in Jiangsu province’s Huai’an city, named Dehuai Semiconductor. (Lee sold his stake the same year, citing a clash in vision with the firm’s other managers.)

    In 2017, Lee invited Chinese media to tour Tacoma’s facilities, declaring the company had somehow scored 200 million yuan ($30.7 million) in sales. Tacoma had yet to even finish construction on its manufacturing facilities.

    Lee initially agreed to an NPR interview for this story but later retracted it, citing state pressure. “Officials have told me not to talk to the media,” he said by text.

    Yeah, I bet.

    By 2018, Tacoma’s employees were blasting an online forum run by the Nanjing mayor’s office with complaints about unpaid salaries. Chinese corporate records show at least 50 legal complaints have been filed against Tacoma in provincial court, all seeking to recoup construction costs or unpaid wages. Lee disputes owing employees 20 million yuan in unpaid wages.

    “Real or fake, the truth is in the hearts of the people,” Lee wrote shortly after these allegations, on Wechat, the Chinese messaging app, and cited a verse from the New Testament: “Now faith is the certainty of things hoped for, a proof of things not seen.”

    Citing bible verse when rumbled for his scam. Classic.

    Hongxin, Tacoma and Dehuai were able to secure billions of yuan in state funding on the condition they would match that with investment of their own — a commitment that never materialized. Tacoma eventually raised only a fraction — 250 million out of 2.5 billion yuan — of what it promised.

    “We never imagined that when our cash flow dried up, we would not be able to find new [cash flow sources], that we would get in so deep,” he told Japanese broadcaster NHK this March.

    And this is the problem with doing business in China in general: it’s shell games all the way down. At lot of times, loans and investments are siphoned through four or five different entities from the purposes for which they were originally obtained. Everyone’s trying to get rich, and they hope to survive on smoke and mirrors long enough to get profitable. Imagine if Kleiner Perkins invested $25 million in a software startup, only to find that money was spent on a noodle shop, a used car dealership and a golf club manufacturer.

    Sometimes it works. You can build a company on margin, get profitable quickly, and be paying off investors and contractors before anyone realizes how shaky the entire enterprise is.

    But you can’t do that with semiconductor manufacturing. The startup costs are simply too high, easily in the billions. Very, very few companies can afford to be in a game that expensive. China’s two biggest semiconductor manufacturing success stories, SMIC and Tsinghua Unigroup, all have have CCP direct government investment.

    In this game, little hucksters working the margins have no chance.