Here’s some videos of BAE’s new M1299 self-propelled Extended Range Cannon Artillery (ERCA) firing Raytheon’s precision-guided M982 Excalibur artillery round. The round itself isn’t new, it’s been around for over a decade, but using the ERCA, they recently extended the effective range of the shell out to 43 miles:
“That blew up real good!”
Here’s a longer video that shows more detail, but also has one of those annoying computer voice-over tracks:
I suspect the ability to fire and scoot from such long ranges will be useful on future battlefields. They’re also working an integrating an autoloader into the ERCA.
Greetings! Welcome to an extra-late Friday LinkSwarm! I had a doctor’s appointment and have been running behind all day. This week: #BlackLivesMatter activists raking off that sweet, sweet graft, mainstream media keeps up its assault on independent thought, and a bunch of Texas news.
Hustling the rubes for #BlackLivesMatter Dane-geld must really pay well for “trained Marxist” Patrisse Khan-Cullors, because she just bought herself a $1.4 million home in an exclusive Los Angeles neighborhood where “the vast majority of residents are white.” Evidently disdaining “whiteness” is for .
Cullors isn’t the only BLM biggie buying houses on the grift. The FBI arrested Toledo, Ohio #BlackLivesMatter activist Sir Maejor Page for allegedly spending “over $200,000 on personal items generated from donations received through BLMGA Facebook page with no identifiable purchase or expenditure for social or racial justice” and is facing “federal wire fraud and money laundering charges for allegedly spending the money on tailored suits, a home in Ohio, and guns.”
I am suing Twitter for defamation because they said I, James O’Keefe, ‘operated fake accounts.’” O’Keefe wrote in an emailed statement to The Federalist. “This is false, this is defamatory, and they will pay. Section 230 may have protected them before, but it will not protect them from me. The complaint will be filed Monday.”
The discovery process for that is going to be lit…
Speaking of censorship, the Epoch Times had to suspend printing of its Hong Kong edition after its presses were busted up. For the fourth time.
“NYT Journalist Erases ENTIRE Twitter After National Pulse Unearths Posts Admitting “Working For The Chinese Communist Party.” That would be one Jonah K. Kessel.
There are three main elements in what @nytimes reporter @farnazfassihi does which infuriates Iranian people.
1. She consistently spreads misinformation regarding Iran. All this misinfo is in one direction: whitewashing the IR regime's actions against its people. Examples follow.
2. She has blocked almost all Iranians who may point out the falsehood of the information she spreads. She used to do that on any instance of noting the lies. But as I will show below, she is now using a bot to block ANY mention of her name in Persian.#NYTimesPropaganda
Public officials across the country are only now discovering the foreseeable consequences of these decisions. City legislatures are realizing that in their attempt to make life better for marginalized groups, they have only contributed to the disproportionate hardships they already face. As it becomes apparent that moves to defund the police have exacerbated criminality, some local authorities are reversing cuts to police budgets passed last year amid much radical breast-beating but without much thought for who would bear the likely consequences.
Minneapolis is the epicentre of the defund movement—the city in which George Floyd died last May as he was being taken into police custody. In spite of a spike in crime there in 2020, including a 70 percent increase in homicides, the Minneapolis City Council decided in December to redistribute $8 million from the police budget to other violence prevention services. At the time, Mayor Jacob Frey said there were “good reasons to be optimistic about the future in Minneapolis.” The move to reallocate funds away from the police department was proclaimed a “Safety for All” plan by its supporters. Unfortunately, it has made the streets of Minneapolis considerably less safe. In the first three weeks of 2021, Minneapolis saw a 250 percent increase in gunshot wound victims from the same time last year.
“Texas Supreme Court Delivers Dallas Salon Owner Shelley Luther a Delayed Victory.” “The remaining five days in jail and $7,000 fine ordered by the district court is now off the table entirely.”
Until Biden came along, every single covid-19 relief bill was approved with overwhelming bipartisan support in both houses. Congress passed three covid relief packages in March 2020 with margins of 96-1, 90-8, and 96-0 in the Senate, and with overwhelming bipartisan support in the House. This was followed in April by the Paycheck Protection Program and Health Care Enhancement Act, which passed 388-5 in the House and by unanimous consent in the Senate. Indeed, the votes were so bipartisan that Democrats blocked another covid relief package until after Election Day — because they did not want to let President Donald Trump claim credit for another bipartisan victory before voters went to the polls. But after he lost and they finally allowed another covid bill to come up for a vote in December, it passed both houses of Congress with similar margins.
Yeah, but bipartisan doesn’t curry favor with the hard left who want massive graft payoffs and total control.
Former Texas Lt. Governor David Dewhurst was arrested on Class A Misdemeanor Assault Family Violence charges in Dallas after a scuffle over a laptop. “Hotel management told police officers that the woman was assaulted by Dewhurst. Officers spoke with the woman who said that Dewhurst was boarding a bus when the woman remembered that she had his laptop. It was a shared laptop that they both had access to, the affidavit said.” I wonder if the woman is the same 40-year old “live-in girlfriend” Leslie Caron who allegedly broke two of his ribs last year. Also makes you wonder: 1. Just what was on that laptop, and 2. What Dewhurst, a man with a reported net worth of over $200 million, was doing riding a bus…
I want everybody who works hard and plays fair to prosper. I want everybody to be able to support themselves. But if you just pull the money out of midair you’re going to create other problems, like there is a ladder of success that people climb and some of those jobs that are out there for seven, eight, nine dollars an hour, in my view, they’re simply not intended to be careers.
The problem with Austin this time of year is that the air is just filled with pollen:
There is no doubt that part of the goal of Allen v. Farrow was to finish off both Allen’s career and his legacy by presenting a definitive guilty verdict in the court of public opinion. The filmmakers, aided by a mostly uncritical press, have undoubtedly won over a large segment of the public—those who come to this subject for the first time through their HBO subscriptions, or who aren’t inclined to question “survivors.” But for those of us who are familiar with the story, or who take the trouble to check it out, the effect is the opposite. If making the case against Allen requires his cultural prosecutors to weave this kind of intellectually dishonest, emotionally manipulative, selectively edited account of the underlying drama, then the case for acquittal becomes stronger, not weaker.
For some reason, WordPress is now putting random gaps between bullet points in the LinkSwarm, so I’m having to tinker with the look and feel a bit. I may even have to update to a more current version…
Congressional Democrats plan to unveil legislation expanding the size of the Supreme Court on Thursday, according to three congressional sources familiar with the closely held measure.
The bill would add four seats to the high court, bringing the total to 13 from the current nine. The bill is led by House Judiciary Committee Chair Jerry Nadler, Subcommittee chair Hank Johnson, and freshman Rep. Mondaire Jones. In the Senate, the bill is being championed by Ed Markey of Massachusetts.
Never mind that “sainted” Supreme Court Justice Ruth Bader Ginsburg opposed court packing, or that Biden himself denounced the idea back in the Bush43 days:
Last week, President Biden announced his new committee to study increasing the size of the Supreme Court. Here’s Senator Biden in April 2005 decrying FDR’s court packing scheme in 1937 as a corrupt power grab: pic.twitter.com/zv1UxIuoCO
The question is whether they’re seriously going to try to push this through, no matter how many seats it loses them in 2022, or if this is all a mime show to appease the activist base that demands seizing complete power by any means necessary.
Just how delusional are Democrats? Certainly the leftwing media bubble lets them continuously get high on their own supply, and they’ve been emboldened since their corrupt push to enthrone Slow Joe over both Bernie Sanders and Donald Trump was a success. (And speaking of Bernie, he was on record as opposing court packing as well.) But surely the more sober party strategists realize they actually lost House seats last year, and outright stole three senate seats between Georgia and Michigan. And all that only got them to 50/50 in the senate. Are they really willing to go all in on court packing when pushing through ObamaCare probably cost them a dozen statehouse chambers for generation?
A worst-case scenario for them would to go all-in on court packing, still come up short, and get slaughtered in 2022…
In the wake of last year’s #BlackLivesMatter/#Antifa riots, shoe retailer Foot Locker went full virtue signaling, pledging to commit $200 million over five years to the “black community.” Usually this amounts to payoffs to far left black activists, tossing some black suppliers a few more crumbs, and hoping no one audits your promises after five years.
So what did all that virtue signaling earn Foot Locker when rioting broke out in Minneapolis yet again? A big, steaming plate of bupkis:
Footlocker stores in Minnesota were looted and trashed once again despite the company having donated $200 million dollars to Black Lives Matter causes in the past year.
Minnesota has been hit with yet more violent unrest over the last two nights in response to the police killing of Daunte Wright, who was shot by a female officer who mistook a gun for a taser.
Footage from Sunday night showed looters breaking into a shoe store and stealing Nike trainers, because apparently justice for Daunte Wright looks an awful lot like getting your hands on a brand new pair of Air Max.
By the end of the night, around 20 Brooklyn Center businesses had been looted as well as sporadic looting in surrounding areas, and the chaos was repeated last night.
Apparently, the opportunistic thugs who looted both stores didn’t care too much for Nike and Footlocker’s commitment to helping Black Lives Matter causes.
Paying off radical Marxists spouting a totalitarian ideology is a poor business strategy. They can’t protect you from the mob and all your Dane-geld won’t prevent them from turning on you.
Once you have paid him Dane-geld
You never get rid of the Dane
Funny how social justice warrior types always claim they’re fighting racism, but John Nolte says the most racism-free areas of America can be found in rural MAGA Land:
Life in Rural America (which is where Republican Trump voters live and govern), is clean, safe and racially tolerant. Most places in America where life is dirty, polluted, dangerous, violent, and plagued with racial hate and race riots, are cities that are almost exclusively populated by and governed by Democrats.
Outside of these Democrat-run cities, America is peaceful, safe, clean, and racially tolerant.
What’s more, if you remove these Democrat-run cities from our national statistics, you will find an America that is overwhelmingly peaceful, safe, clean, and racially tolerant.
Nevertheless, Democrats and their fake-media allies still blame Republicans for all of their problems.
According to them, it is Republicans who are responsible for racism, pollution, and gun violence — even though, out here where we all live, our air, water, and streets are safe and clean… We all own guns, but where we live there is no gun violence crisis… We are all supposed to be racists and responsible for all the hate crimes, but out here where we all live, there is no hate crime crisis.
Now, there will be exceptions, but those exceptions only serve to prove the rule.
Let me lay this out for you…
Leftists say they want to live in a Utopia free of gun violence, free of pollution, and free of racism…
Well, that place already exists.
It’s called Rural MAGA Land.
Out here in Rural America the environment is clean, no one worries about getting shot, and there are no racial tensions.
Let me start with a personal example…
For a total of 20 years now, I’ve lived in rural North Carolina. My wife is a Mexican immigrant. Our interracial marriage has never been a problem with anyone. My wife has never had a problem with anyone.
For six years, my next door neighbor was a mixed-race family. Black and white. They never had a problem.
On the other side of me is a couple with mixed-race grandkids. Black, white, and brown. They’ve never had a problem.
Riddle me this fake-media and Democrats: If Rural America is where all the racists are supposed to live, where’s all the racism in Rural America?
Everyone I know out here in Rural MAGA Land owns guns (plural), and yet I can’t remember the last time we had a shooting in my county, a county where shoplifting still makes the front page.
He also includes some eye-opening hate crime statistics:
According to the Department of Justice, out here where I live in rural North Carolina, throughout all of 2019, there were a total of only 20 hate crime allegations in our 13 rural counties where the population adds up to 668,000. That means that throughout 2019, there were only 2.9 hate crime allegations per 100,000 people.
Guess what the hate crime number is in some of the most progressive, left-wing cities in America? Well, you don’t have to guess, because I have those numbers for you….
Portland, OR = 5.75 reported hate crime incidents per 100,000
Boulder, CO = 7.9 incidents per 100,000
San Francisco, CA = 7.2 incidents per 100,000
Portland, OR = 5.2 incidents per 100,000
Alexandria, VA = 3.1 incidents per 100,000
Arlington, VA = 4.7 incidents per 100,000
Seattle, WA = 40 (not a typo) per 100,000
Washington DC = 29 (not a typo) incidents per 100,000 (this is where the elite media live LOL)
I think you are starting to get the point, but let’s close with my personal favorite…
Berkeley, CA = 6.5 per 100,000
Keep in mind that I think “hate crimes” are mostly bunk. But clearly, such crimes are far more prevalent in SJW hotbeds like Seattle and Portland than they are in rural America.
Clearly social justice warriors make race relations worse.
Plus some eye-opening statistics on crime:
Except for Jacksonville and Indianapolis (which have had both Republican and Democrat rule in recent years), every one of America’s most murderous cities has been run exclusively by Democrats for decades, and not a single one of those cities — not one! — has been run exclusively by Republicans.
Here’s a list of 2020’s top ten most dangerous cities per capita (violent crime incidents per 100,000 residents) and which party runs those cities… Spoiler alert: Democrats.
Detroit – 1,965 per 100,000 – Democrats have run Detroit since 1962
St. Louis – 1,927 per 100,000 – Democrats have run St. Louis since 1949
Memphis – 1,901 per 100,000 – Democrats have run Memphis since 1992
Baltimore – 1,859 per 100,000 – Democrats have run Baltimore since 1967
Springfield (MO) – 1,519 per 100,000 – mayoral office is non-partisan, but the city is left-leaning
Little Rock – 1,517 per 100,000 – ruled by Democrats for decades
Cleveland – 1,517 per 100,000 – Ruled by Democrats since 1990
Stockton – 1,397 per 100,000 – Alternates between GOP and Dem mayors.
Albuquerque – 1,352 per 100,000 – One Republican since 1985
Milwaukee – 1,332 per 100,000 – Only Socialist and Democrat mayors since 1906
Many of the cities that defunded police last year in a fit of social justice warrior-endorsed madness have reversed course once crime rates started spiraling. But Austin’s hard-left City Council seems stuck on stupid.
After the Austin police budget cut on top of the repeal of the public camping ban, Austin crime and disorder has gotten measurably worse. Austin police are also leaving in droves:
After the Austin city council voted unanimously to defund its police department by about one-third of its budget, in August 2020, many predicted that once the cuts kicked in a flood of officers would leave the force as soon as they could. The new district attorney’s policy of re-investigating police officers for closed cases is also expected to cause officers to resign or retire.
The city council’s cuts officially kicked in and have been in place for a few months.
PJ Media reports exclusively that APD is now suffering a huge surge of officer departures putting it on pace to shatter 2020’s record.
In January 2021, sources tell PJ Media 20 officers retired from APD and eight resigned, for a total of 28 departures.
In February 2021, five officers resigned and six retired, according to multiple sources, for a total of 11 departures.
In March 2021, 24 more officers left APD, with 20 officers retiring. Additionally, three officers resigned and one was terminated.
To put this into perspective, 2019 was the last non-pandemic year and the year before the city council cut APD’s budget. APD averages about 50 retirements or separations in a calendar year, and replaces them with cadets who have graduated from the police academy or officers who join APD from another force.
APD saw 46 officers retire with another 22 resigning in 2019, according to local TV news station KVUE.
2020’s numbers were exacerbated by the George Floyd riots; 78 officers departed or retired from APD from the beginning of those riots to the end of 2020, for a total of 89 separations, according to KVUE.
Official 2021 numbers provided to PJ Media by the Austin Police Retirement System (APRS) break down as follows:
Prior to 2020, retirements averaged 50-52 per year over the last 5-6 years
Record number of retirements in FY 2020: 97
First-quarter 2021 retirements: 45
Add to those 45 retirements the 18 resignations or terminations, for a total of 63 separations in just the first quarter of 2021. If the current pace continues, APD could lose approximately 252 officers — about five times the average number of separations for a year. This will impact public safety across the board, and according to the APRS, can impact retirees’ benefits as well. APRS raised the alarm about the impact the city council’s cuts could have in September of 2020.
March 2021’s retirements hit all over the department, including tactical intelligence, gang crimes, narcotics enforcement, investigations, and the bomb squad, according to a full list provided to PJ Media. Traffic enforcement — both warnings and citations — has declined by more than 60% in the first two months of 2021, a source tells PJ Media.
At the same time, the city council’s cuts have forced the cancellation of police cadet classes. The department is losing experienced officers in droves and is unable to replace them with new officers.
Fewer officers means fewer officers to cover 911 calls, to the point that some 911 calls now result in “NUA”s: No Officer Available:
04/11/21 03:31 9500 N Lamar Blvd
Shoot/Stab Urgent: NUA Citywide (No Units Avail) IDA, CHAR, ADAM, EDWD, DAVD, BAKR, FRNK,GRGE, HENR. Subj with firearm. 1 female stabbed. Trans to Hosp.
Indicting police officers who have committed crimes is proper. Referring every allegation against a police officer to a grand jury—a promise Garza repeatedly made as a candidate–is not. It is not proper because it is not how allegations against all others are handled. Singling out persons based on their status is discriminatory and, ironically, itself an abuse of power. Such overt antagonism against law enforcement undoubtedly will erode cooperation between APD and the DA’s office and impact adversely criminal justice in Austin generally.
Garza clearly wants to promote a perception that police misconduct will not be tolerated and successfully indicting APD officers might serve that purpose. Failure to prosecute after indictment, however, ultimately will undermine public trust and confidence in Garza and his office. Garza’s hostility toward police can also engender public animosity toward APD as an organization. Effective policing requires community support. To the extent Garza persists in attacking APD as racist and corrupt, social and racial divisions will worsen and impede cooperation.
Snip.
Garza’s anti-law enforcement campaign closely resembled those of other Soros-backed socialist candidates for district attorney around the country. He promised to abolish the requirement of bail, to ignore laws he does not like and violations of those laws. He promised immunity to persons for conduct he considered status crimes. He promised to discriminate against police and to treat immigrants more favorably than citizens. Based on the actual policies of those DA’s elected in other large cities, it was entirely predictable that Garza would follow suit. My campaign sought to warn voters of the threat to public safety and security as evidenced by deteriorating conditions in cities like San Francisco, Portland and Chicago. Because Garza is an ideologue, he will not be deterred by the harm his policies will surely cause our community. He is more committed to his ideology than the rule of law.
Is there any light at the end of the tunnel? Some. Face with rising murder rates, the Austin City Council finally relented and is allowing a new APD cadet class to be trained, though it looks like they’re going to try to cram “more community involvement” (a codeword for more far-left social justice warrior meddling) into the curriculum. And various bills are winding their way through the Texas legislature to address Austin’s idiocy.
A huge improvement, of course, will happen if Proposition B passes on May 1st. But expect Austin policing to continue to get short shrift as long as Garza, Austin mayor Steve Adler and the current City Council remain in office.
In my continuing series of “Videos of .50 BMG Rounds Hitting Things Make Great Lazy Blog Fodder,” here’s Kentucky Ballistics testing SLAP, Raufoss, and other exotic .50 BMG rounds against body armor plates.
Representative Dan Crenshaw (R., Texas) announced that he received emergency surgery on his left eye on Friday, which will leave the congressman “effectively blind” for the next month.
Crenshaw said he noticed blurry spots in his vision over the past few days, and was informed by an ophthalmologist that his retina was detaching. The congressman’s right eye was destroyed in an IED explosion while on a 2012 deployment in Afghanistan, and his left eye also required surgery after being injured in the blast.
The Friday surgery “went well, but I will be effectively blind for about a month,” Crenshaw said in a statement on Saturday morning in which he thanked the medical team who conducted the operation. “During the surgery they put a gas bubble in my eye, which acts as a bandage for my retina. This means I have to be face-down for the next week or so, unable to see anything.”
Crenshaw added that his congressional offices in Washington, D.C., and Houston would continue to operate normally.
“This is a terrifying prognosis for someone with one eye, and the nature of the injuries that I sustained in Afghanistan. Anyone who knows the history of my injuries knows that I don’t have a ‘good eye,’ but half a good eye.”
Best wishes to Rep. Crenshaw for a speedy recovery.
CBS’s “60 Minutes” deceptively edited an exchange that reporter Sharyn Alfonsi had with Florida Governor Ron DeSantis (R) two weeks ago about the way the Sunshine State has rolled out its vaccination program.
In the clip, Alfonsi suggested that Publix, the largest grocery store chain in Florida, had engaged in a pay-to-play scheme with DeSantis where they donated money to his campaign in exchange for him awarding a contract to the grocery store chain to host vaccinations.
CBS edited the interaction between DeSantis and Alfonsi when she showed up to a press conference a few weeks ago and repeatedly confronted the governor. The network cut out a lengthy portion of DeSantis’ response in which he explains what happened and how decisions were made.
The Arkansas General Assembly voted Tuesday to enact a ban on gender transition surgery for minors, overriding a veto by Governor Asa Hutchinson.
Arkansas is the first state to ban transition surgery for minors, although similar legislation is under consideration in other states. The bill also prohibits doctors in Arkansas from administering hormones or puberty blockers to residents under age 18.
Here’s a word to every single Republican office holder in America: this is not an optional fight. You fight on this hill or we’ll replace you with someone who will.
Remember how President Trump “detaining kids in cages” was the Worst Thing In The World? Well, Joe Biden is detaining 18,000 illegal alien minors, almost seven times as many. And Democrats aren’t uttering a peep of protest because they never really cared about those kids anyway, they just wanted to: A.) Bash Trump, and B.) Open up the border so they can amnesty a new wave of illegals as Democratic Party voters.
Speaking of illegal aliens: “New York is reportedly going to spend $2.1 Billion on a fund to give illegal aliens COVID relief payments up to $15,600 per person.” Did any of these Democrats actively campaign on giving taxpayer money to illegal aliens? It’s like they want to live down to the most outlandish Republican parodies of Democrats.
Liberal writer Thomas Frank says that fellow liberals are deluding themselves if they think “misinformation” is the source of all their problems and censorship is the answer:
In liberal circles these days there is a palpable horror of the uncurated world, of thought spaces flourishing outside the consensus, of unauthorized voices blabbing freely in some arena where there is no moderator to whom someone might be turned in. The remedy for bad speech, we now believe, is not more speech, as per Justice Brandeis’s famous formula, but an “extremism expert” shushing the world.
What an enormous task that shushing will be! American political culture is and always has been a matter of myth and idealism and selective memory. Selling, not studying, is our peculiar national talent. Hollywood, not historians, is who writes our sacred national epics. There were liars-for-hire in this country long before Roger Stone came along. Our politics has been a bath in bullshit since forever. People pitching the dumbest of ideas prosper fantastically in this country if their ideas happen to be what the ruling class would prefer to believe.
Authorities have charged Adalberto Fructuoso Comparan-Rodriguez, whose nickname is “Fruto,” the former mayor of Aguililla, Mexico, and the reported leader of the United Cartels in Michoacán, Mexico, with drug trafficking crimes, according to the indictment.
Alfonso Rustrian, of Mexico, has also been charged as a co-conspirator. Another four defendants were charged for their roles in the alleged methamphetamine scheme.
According to court filings, Comparan-Rodriguez and Rustrian met in Cali, Colombia, with whom they believed were members of Hezbollah but were actually undercover DEA agents. Comparan-Rodriguez and Rustrian agreed to send 1,100 pounds of methamphetamine from Mexico through Texas to the Miami area, according to the charges.
Once the meth arrived in Miami, Comparan-Rodriguez and Rustrian allegedly cracked open the concrete tiles and dissolved the meth inside 5-gallon buckets of house paint. The men are alleged to have extracted the pure crystal meth from the paint.
The mysterious case of “Dr. Jialun,” an anti-Trump Twitter troll who got his account verified despite having a fake profile and all of 100 followers.
Legal Insurrection is suing SUNY Upstate Medical University for refusing to comply with a New York Freedom of Information Law request on information related to Critical Race Theory training.
Man tells his estranged girlfriend he’s driving to Florida to kill her, is shocked when he gets there and gets arrested.
Sgt. Charles H. Coolidge, previously America’s oldest living Congressional Medal of Honor winner, went to his final muster. I previously mentioned him here. That makes Hershel Woody Williams America’s last living Congressional Medal of Honor winner from World War II.
Golden Retriever has had enough of your fake news:
Weather report from Moscow streets was suddenly interrupted by a four-legged heckler. A dog stole the microphone from the reporter of a Russian broadcaster. A golden retriever jumped at Nadezhda Serezhkina, grabbed the microphone and ran away – during LIVE broadcast. pic.twitter.com/po16bUGazB
For new, cutting edge fabs, the short answer is yes. If you’ve bought a new computer or smart phone in the last year, the chances that at least some of the layers in some of the chips went through an ASML EUV stepper approaches 100%.
The technology required to produce EUV sounds like something a crazy person would dream up:
Earlier generations of kit employ lasers to produce light directly. But as wavelengths shrink, things get trickier. Inside a cutting-edge EUV machine 50,000 droplets of molten tin fall through a chamber at its base each second. A pair of lasers zap every drop, creating a plasma that in turn releases light of the desired wavelength. The mirrors guiding this light, made of sandwiched layers of silicon and molybdenum, are ground so precisely that, if scaled to the size of Germany, they would have no bumps bigger than a millimetre. Because EUV light is absorbed by almost anything, including air, the process must take place in a vacuum. To get into the production facilities, your correspondent had to don a special suit and leave his notebook behind, lest it shed unwanted fibres.
The machines, weighing 180 tonnes and the size of a double-decker bus, are themselves a testament to the electronics industry’s tangled supply chains. ASML has around 5,000 suppliers. Carl Zeiss, a German optics firm, fashions its lenses. VDL, a Dutch company, makes the robotic arms that feed wafers into the machine. The light source comes from Cymer, an American company bought by ASML in 2013. ASML is, in turn, one of hundreds of firms that supply the chipmakers themselves. But it is so vital that Intel, Samsung and TSMC have all chipped in to finance its research and development in return for stakes in the firm.
The tool consists of a laser-driven tin (Sn) plasma light source, reflective optics comprising multilayer mirrors, contained within a hydrogen gas ambient. The hydrogen is used for keeping the EUV collector mirror in the source free of Sn deposition.
EUVL is a significant departure from the deep ultraviolet lithography standard. All matter absorbs EUV radiation. Hence, EUV lithography requires a vacuum. All optical elements, including the photomask, must use defect-free molybdenum/silicon (Mo/Si) multilayers (consisting of 40 Mo/Si bilayers) that act to reflect light by means of interlayer interference; any one of these mirrors absorb around 30% of the incident light.
Current EUVL systems contain at least two condenser multilayer mirrors, six projection multilayer mirrors and a multilayer object (mask). Since the mirrors absorb 96% of the EUV light, the ideal EUV source needs to be much brighter than its predecessors. EUV source development has focused on plasmas generated by laser or discharge pulses. The mirror responsible for collecting the light is directly exposed to the plasma and is vulnerable to damage from high-energy ions and other debris such as tin droplets, which require the costly collector mirror to be replaced every year.
Also:
An EUV mask consists of 40 alternating silicon and molybdenum layers; this multilayer acts to reflect the extreme ultraviolet light through Bragg diffraction; the reflectance is a strong function of incident angle and wavelength, with longer wavelengths reflecting more near normal incidence and shorter wavelengths reflecting more away from normal incidence. The pattern is defined in a tantalum-based absorbing layer over the multilayer. The multilayer may be protected by a thin ruthenium layer.
Got that? Good. That Wikipedia page is worth scrolling all the way through once for for the humbling realization of just how complex and precise dozens of different areas of chemistry, physics and optics combine to allow this one semiconductor tool to function.
“Sure, we’re zapping droplets of molten tin with high energy lasers in an atmosphere of pure hydrogen to create pulses of light reflected off eight impossibly smooth mirrors of 40 layers each to pattern billions of lines on a tiny patch of silicon at the heart of a $120 million, 180 ton machine, but it’s actually a lot more complex than I’m making it sound. Also, we do it 96 times on a single pass on a single 300mm wafer, and we handle 170 wafers an hour.”
Here are a couple of videos showing how large and complex an EUV stepper is:
